검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Plasma-surface interactions of model polymers for advanced photoresists using C4F8/Ar discharges and energetic ion beams Engelmann S, Bruce RL, Kwon T, Phaneuf R, Oehrlein GS, Bae YC, Andes C, Graves D, Nest D, Hudson EA, Lazzeri P, Lacob E, Anderle M Journal of Vacuum Science & Technology B, 25(4), 1353, 2007 |