검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
X-ray photoelectron spectroscopy study of TiN films produced with tetrakis(dimethylamido)titanium and selected N-containing precursors on SiO2 Endle JP, Sun YM, White JM, Ekerdt JG Journal of Vacuum Science & Technology A, 16(3), 1262, 1998 |
| 2 |
Thermodynamics of the Formation of Tin from TiCl4-NH3-H-2 on a Patterned Oxidized Silicon Substrate Bouteville A, Imhoff L, Remy JC Journal of the Electrochemical Society, 143(10), 3251, 1996 |
| 3 |
Atomic Layer Epitaxy Growth of Tin Thin-Films Ritala M, Leskela M, Rauhala E, Haussalo P Journal of the Electrochemical Society, 142(8), 2731, 1995 |
| 4 |
Chemical-Vapor-Deposition Tin Process for Contact via Barrier Applications Paranjpe A, Islamraja M Journal of Vacuum Science & Technology B, 13(5), 2105, 1995 |