검색결과 : 1건
No. | Article |
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1 |
Intrinsic limitations on device performance and reliability from bond-constraint induced transition regions at interfaces of stacked dielectrics Lucovsky G, Yang H, Niimi H, Keister JW, Rowe JE, Thorpe MF, Phillips JC Journal of Vacuum Science & Technology B, 18(3), 1742, 2000 |