검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Real-Time, Noninvasive Temperature Control of Wafer Processing Based on Diffusive Reflectance Spectroscopy Wang ZZ, Kwan SL, Pearsall TP, Booth JL, Beard BT, Johnson SR Journal of Vacuum Science & Technology B, 15(1), 116, 1997 |