검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Quantitative static Time-of-Flight Secondary Ion Mass Spectrometry analysis of anionic minority species in microelectronic substrates Ravanel X, Trouiller C, Juhel M, Wyon C, Kwakman LFT, Leonard D Applied Surface Science, 255(4), 1415, 2008 |
| 2 |
Static time-of-flight secondary ion mass spectrometry analysis of microelectronics related substrates using a polyatomic ion source Ravanel X, Trouiller C, Juhel M, Wyon C, Kwakman LFT, Leonard D Applied Surface Science, 255(4), 1440, 2008 |
| 3 |
SIMS depth profiling of boron ultra shallow junctions using oblique O-2(+) beams down to 150 eV Juhel A, Laugier F, Delille D, Wyon C, Kwakman LFT, Hopstaken A Applied Surface Science, 252(19), 7211, 2006 |