검색결과 : 2건
No. | Article |
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1 |
Metalorganic chemical vapor deposition of copper on ruthenium thin film Kwak DK, Lee HB, Han JW, Kang SW Electrochemical and Solid State Letters, 9(10), C171, 2006 |
2 |
Enhancement of iodine adsorption on ruthenium glue layer for seedless CECVD of Cu Lee HB, Kwak DK, Kang SW Electrochemical and Solid State Letters, 8(2), C39, 2005 |