검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Electrical stability of polyimide siloxane films for interlayer dielectrics in multilevel interconnections Homma T, Yamaguchi M, Kutsuzawa Y, Otsuka N Thin Solid Films, 340(1-2), 237, 1999 |
| No. | Article |
|---|---|
| 1 |
Electrical stability of polyimide siloxane films for interlayer dielectrics in multilevel interconnections Homma T, Yamaguchi M, Kutsuzawa Y, Otsuka N Thin Solid Films, 340(1-2), 237, 1999 |