| 1 |
Radio frequency sputter deposition of Cu2ZnSnS4 thin films with a temperature-controlled reflector wall: Effects of H-2 addition to the sputtering gas
Kusano E, Kondo Y
Thin Solid Films, 646, 75, 2018 |
| 2 |
Mechanisms of the structural modification of Ti films by pulsed direct current and inductively coupled plasma-assisted pulsed direct current sputtering
Kusano E, Kikuchi N
Thin Solid Films, 634, 73, 2017 |
| 3 |
Preface (TACT 2011 Special Issue)
Huang JL, Ting JM, Huang JL, Ting JM, Hsieh JH, Feng ZC, Chu JP, Park HH, Liu CP, Kusano E
Thin Solid Films, 529, 1, 2013 |
| 4 |
Structure modification of titanium oxide thin films by rf-plasma assistance in Ti-O-2 reactive dc and pulsed dc sputtering
Sakamoto M, Kusano E, Matsuda H
Thin Solid Films, 531, 49, 2013 |
| 5 |
Interface stress induced hardness enhancement and superelasticity in polytetrafluoroethylene/metal multilayer thin films
Kusano E, Kikuchi N
Thin Solid Films, 520(1), 404, 2011 |
| 6 |
Removal of Ion-Implanted Photoresists Using Atomic Hydrogen
Yamamoto M, Maruoka T, Goto Y, Kono A, Horibe H, Sakamoto MA, Kusano E, Seki H, Tagawa S
Journal of the Electrochemical Society, 157(3), H361, 2010 |
| 7 |
Removal of Ion-Implanted Photoresists Using Wet Ozone
Yamamoto M, Goto Y, Maruoka T, Horibe H, Miura T, Kusano E, Tagawa S
Journal of the Electrochemical Society, 156(7), H505, 2009 |
| 8 |
Effects of radio-frequency plasma on structure and properties in Ti film deposition by dc and pulsed dc magnetron sputtering
Oya T, Kusano E
Thin Solid Films, 517(20), 5837, 2009 |
| 9 |
Proceedings of the international symposium on dry process - DPS 2005
Fujiwara N, Stamate E, Yeom GY, Shiratani M, Chang HY, Economou DJ, Kusano E, Chang JP
Thin Solid Films, 515(12), 4843, 2007 |
| 10 |
Polyimide-based organic thin films prepared by rf magnetron sputtering
Kinbara A, Hayashi T, Wakahara K, Kikuchi N, Kusano E, Nanto H
Thin Solid Films, 433(1-2), 274, 2003 |
