검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Patterning performance of EB-X3 x-ray mask writer Ohki S, Watanabe T, Takeda Y, Morosawa T, Saito K, Kunioka T, Kato J, Shimizu A, Matsuda T, Tsuboi S, Aoyama H, Watanabe H, Nakayama Y Journal of Vacuum Science & Technology B, 18(6), 3084, 2000 |
| 2 |
EB-X3: New electron-beam x-ray mask writer Morosawa T, Saito K, Takeda Y, Kunioka T, Shimizu A, Kato J, Matsuda T, Kuriyama Y, Nakayama Y, Matsui Y Journal of Vacuum Science & Technology B, 17(6), 2907, 1999 |
| 3 |
XY stage driven by ultrasonic linear motors for the electron-beam x-ray mask writer EB-X3 Kunioka T, Takeda Y, Matsuda T, Shimazu N, Nakayama Y Journal of Vacuum Science & Technology B, 17(6), 2917, 1999 |