검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
An organic low-k film deposited by plasma-enhanced copolymerization Kawahara J, Kunimi N, Kinoshita K, Nakano A, Komatsu M, Seino Y, Kikkawa T Journal of the Electrochemical Society, 154(3), H147, 2007 |
| 2 |
Effect of bridging groups of precursors on modulus improvement in plasma-enhanced copolymerized low-k films Kawahara J, Kunimi N, Nakano A, Kinoshita K, Hayashi Y, Komatsu M, Seino Y, Ichikawa R, Takasu Y, Kikkawa T Journal of the Electrochemical Society, 154(3), H198, 2007 |
| 3 |
Vapor phase reactions in polymerization plasma for divinyisiloxane-bis-benzocyclobutene film deposition Kinoshita K, Nakano A, Kawahara J, Kunimi N, Hayashi Y, Kiso O, Saito N, Nakamura K, Kikkawa T Journal of Vacuum Science & Technology A, 24(6), 2192, 2006 |