검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Ultrathin TiN Membranes as a Technology Platform for CMOS-Integrated MEMS and BioMEMS Devices Birkholz M, Ehwald KE, Kulse P, Drews J, Frohlich M, Haak U, Kaynak M, Matthus E, Schulz K, Wolansky D Advanced Functional Materials, 21(9), 1652, 2011 |