검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Multi-scale modeling of chemical vapor deposition processes for thin film technology Kleijn CR, Dorsman R, Kuijlaars KJ, Okkerse M, van Santen H Journal of Crystal Growth, 303(1), 362, 2007 |
| 2 |
Design and Scale-Up of Chemical-Vapor-Deposition Reactors for Semiconductor Processing Kleijn CR, Kuijlaars KJ, Vandenakker HE Chemical Engineering Science, 51(10), 2119, 1996 |
| 3 |
Modeling of Selective Tungsten Low-Pressure Chemical-Vapor-Deposition Kuijlaars KJ, Kleijn CR, Vandenakker HE Thin Solid Films, 290-291, 406, 1996 |
| 4 |
A Detailed Model for Low-Pressure CVD of Tungsten Kuijlaars KJ, Kleijn CR, Vandenakker HE Thin Solid Films, 270(1-2), 456, 1995 |