검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Ion multibeam nanopatterning for photonic applications: Experiments and simulations, including study of precursor gas induced etching and deposition Ebm C, Platzgummer E, Loeschner H, Eder-Kapl S, Joechl P, Kuemmel M, Reitinger R, Hobler G, Koeck A, Hainberger R, Wellenzohn M, Letzkus F, Irmscher M Journal of Vacuum Science & Technology B, 27(6), 2668, 2009 |