화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Enhancing epitaxial SixC1-x deposition by adding Ge
Ostermay I, Kammler T, Bartha JW, Kucher P
Thin Solid Films, 518(10), 2834, 2010
2 Post annealing effect on ultra-thin Hf-based high-k gate oxides on Si
Kim JH, Ignatova VA, Kucher P, Weisheit M, Zschech E
Current Applied Physics, 9(2), E104, 2009
3 Correlation of microscopic and macroscopic electrical characteristics of high-k ZrSixO2-x thin films using tunneling atomic force microscopy
Weinreich W, Wilde L, Kucher P, Lemberger M, Yanev V, Rommel M, Bauer AJ, Erben E, Heitmann J, Schroder U, Oberbeck L
Journal of Vacuum Science & Technology B, 27(1), 364, 2009