검색결과 : 1건
No. | Article |
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1 |
Effect of substrate-enhanced and inhibited growth on atomic layer deposition and properties of aluminum-titanium oxide films Arroval T, Aarik L, Rammula R, Kruusla V, Aarik J Thin Solid Films, 600, 119, 2016 |
No. | Article |
---|---|
1 |
Effect of substrate-enhanced and inhibited growth on atomic layer deposition and properties of aluminum-titanium oxide films Arroval T, Aarik L, Rammula R, Kruusla V, Aarik J Thin Solid Films, 600, 119, 2016 |