화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Understanding the evolution of trench profiles in the via-first dual damascene integration scheme
Kropewnicki T, Doan K, Tang B, Bjorkman C
Journal of Vacuum Science & Technology A, 19(4), 1384, 2001
2 Growth of GaN on lithium gallate substrates for development of a GaN thin compliant substrate
Doolittle WA, Kropewnicki T, Carter-Coman C, Stock S, Kohl P, Jokerst NM, Metzger RA, Kang S, Lee KK, May G, Brown AS
Journal of Vacuum Science & Technology B, 16(3), 1300, 1998