검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Fabrication of Metal-Oxide-Semiconductor Devices with Extreme-Ultraviolet Lithography Nguyen KB, Cardinale GF, Tichenor DA, Kubiak GD, Berger K, Raychaudhuri AK, Perras Y, Haney SJ, Nissen R, Krenz K, Stulen RH, Fujioka H, Hu C, Bokor J, Tennant DM, Fetter LA Journal of Vacuum Science & Technology B, 14(6), 4188, 1996 |
| 2 |
Printability of Substrate and Absorber Defects on Extreme-Ultraviolet Lithographic Masks Nguyen KB, Raychaudhuri AK, Stulen RH, Krenz K, Fetter LA, Tennant DM, Windt DL Journal of Vacuum Science & Technology B, 13(6), 3082, 1995 |