검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Ultrathin fluorinated diamondlike carbon coating for nanoimprint lithography imprinters Fillman RW, Krchnavek RR Journal of Vacuum Science & Technology B, 27(6), 2869, 2009 |
| 2 |
Time-dependent exposure dose of hydrogen silsesquioxane when used as a negative electron-beam resist Clark N, Vanderslice A, Grove R, Krchnavek RR Journal of Vacuum Science & Technology B, 24(6), 3073, 2006 |
| 3 |
Bilayer, nanoimprint lithography Faircloth B, Rohrs H, Tiberio R, Ruoff R, Krchnavek RR Journal of Vacuum Science & Technology B, 18(4), 1866, 2000 |
| 4 |
Comparison of infrared frequency selective surfaces fabricated by direct-write electron-beam and bilayer nanoimprint lithographies Puscasu I, Boreman G, Tiberio RC, Spencer D, Krchnavek RR Journal of Vacuum Science & Technology B, 18(6), 3578, 2000 |