검색결과 : 13건
| No. | Article |
|---|---|
| 1 |
Image processing using shape recognition for alignment to damaged registration marks in electron beam lithography Kratschmer E, Klaus DP, Viswanathan R, Turnidge ML, Reed PL, McPhail B Journal of Vacuum Science & Technology B, 27(6), 2563, 2009 |
| 2 |
Hydrogen silsesquioxane-based hybrid electron beam and optical lithography for high density circuit prototyping Guillorn M, Chang J, Fuller N, Patel J, Darnon M, Pyzyna A, Joseph E, Engelmann S, Ott J, Newbury J, Klaus D, Bucchignano J, Joshi P, Scerbo C, Kratschmer E, Graham W, To B, Parisi J, Zhang Y, Haensch W Journal of Vacuum Science & Technology B, 27(6), 2588, 2009 |
| 3 |
Experimental optimization of the electron-beam proximity effect forward scattering parameter Rooks M, Belic N, Kratschmer E, Viswanathan R Journal of Vacuum Science & Technology B, 23(6), 2769, 2005 |
| 4 |
Low stress development of poly(methylmethacrylate) for high aspect ratio structures Rooks MJ, Kratschmer E, Viswanathan R, Katine J, Fontana RE, MacDonald SA Journal of Vacuum Science & Technology B, 20(6), 2937, 2002 |
| 5 |
Performance of Zr/O/W Schottky emitters at reduced temperatures Kim HS, Yu ML, Thomson MGR, Kratschmer E, Chang THP Journal of Vacuum Science & Technology B, 15(6), 2284, 1997 |
| 6 |
Electron-Beam Microcolumns for Lithography and Related Applications Chang TH, Thomson MG, Kratschmer E, Kim HS, Yu ML, Lee KY, Rishton SA, Hussey BW, Zolgharnain S Journal of Vacuum Science & Technology B, 14(6), 3774, 1996 |
| 7 |
Experimental Evaluation of a 20X20 mm Footprint Microcolumn Kratschmer E, Kim HS, Thomson MG, Lee KY, Rishton SA, Yu ML, Zolgharnain S, Hussey BW, Chang TH Journal of Vacuum Science & Technology B, 14(6), 3792, 1996 |
| 8 |
Improved Emission Stability of Carburized Hfc(100) and Ultrasharp Tungsten Field Emitters Yu ML, Hussey BW, Kratschmer E, Chang TH, Mackie WA Journal of Vacuum Science & Technology B, 13(6), 2436, 1995 |
| 9 |
Miniature Schottky Electron Source Kim HS, Yu ML, Kratschmer E, Hussey BW, Thomson MG, Chang TH Journal of Vacuum Science & Technology B, 13(6), 2468, 1995 |
| 10 |
An Electron-Beam Microcolumn with Improved Resolution, Beam Current, and Stability Kratschmer E, Kim HS, Thomson MG, Lee KY, Rishton SA, Yu ML, Chang TH Journal of Vacuum Science & Technology B, 13(6), 2498, 1995 |