화학공학소재연구정보센터
검색결과 : 12건
No. Article
1 How hot is the wire: Optical, electrical, and combined methods to determine filament temperature
Onnink AJ, Schmit J, Kovalgin AY
Thin Solid Films, 674, 22, 2019
2 Selenidation of epitaxial silicene on ZrB2
Wiggers FB, Yamada-Takamura Y, Kovalgin AY, de Jong MP
Applied Surface Science, 428, 793, 2018
3 Low-resistivity alpha-phase tungsten films grown by hot-wire assisted atomic layer deposition in high-aspect-ratio structures
Yang MD, Aarnink AAI, Schmitz J, Kovalgin AY
Thin Solid Films, 646, 199, 2018
4 Inherently area-selective hot-wire assisted atomic layer deposition of tungsten films
Yang MD, Aarnink AAI, Schmitz J, Kovalgin AY
Thin Solid Films, 649, 17, 2018
5 Fabrication and properties of GeSi and SiON layers for above-IC integrated optics
Schmitz J, Rangarajan B, Kovalgin AY
Solid-State Electronics, 108, 8, 2015
6 On the difference between optically and electrically determined resistivity of ultra-thin titanium nitride films
Van Bui H, Kovalgin AY, Wolters RAM
Applied Surface Science, 269, 45, 2013
7 Nanoscale carrier injectors for high luminescence Si-based LEDs
Piccolo G, Kovalgin AY, Schmitz J
Solid-State Electronics, 74, 43, 2012
8 Growth Kinetics and Oxidation Mechanism of ALD TiN Thin Films Monitored by In Situ Spectroscopic Ellipsometry
Van Bui H, Groenland AW, Aarnink AAI, Wolters RAM, Schmitz J, Kovalgin AY
Journal of the Electrochemical Society, 158(3), H214, 2011
9 Low Specific Contact Resistance of NiSi and PtSi to Si: Impact of Interface
Tiggelman N, Kovalgin AY, Brennan R, Wolters RAM
Electrochemical and Solid State Letters, 13(12), H450, 2010
10 Low-temperature SiO2 layers deposited by combination of ECR plasma and supersonic silane/helium jet
Kovalgin AY, Isai G, Holleman J, Schmitz J
Journal of the Electrochemical Society, 155(2), G21, 2008