검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Evaluation of compositional depth profiles in mixed-phase (amorphous plus crystalline) silicon films from real time spectroscopic ellipsometry Ferlauto AS, Ferreira GM, Koval RJ, Pearce JM, Wronski CR, Collins RW, Al-Jassim MM, Jones KM Thin Solid Films, 455-56, 665, 2004 |
| 2 |
Evolution of microstructure and phase in amorphous, protocrystalline, and micro crystalline silicon studied by real time spectroscopic ellipsometry Collins RW, Ferlauto AS, Ferreira GM, Chen C, Koh J, Koval RJ, Lee Y, Pearce JM, Wronski CR Solar Energy Materials and Solar Cells, 78(1-4), 143, 2003 |
| 3 |
Real time analysis of amorphous and microcrystalline silicon film growth by multichannel ellipsometry Collins RW, Koh J, Ferlauto AS, Rovira PI, Lee YH, Koval RJ, Wronski CR Thin Solid Films, 364(1-2), 129, 2000 |