검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Highly Sensitive Analytical Method for Metallic Impurities in the Thin Silicon Layer of Silicon-on-Insulator Wafer Kodate J, Machida K, Imai K, Tanaka M, Yabumoto N Journal of Vacuum Science & Technology B, 15(1), 171, 1997 |