화학공학소재연구정보센터
검색결과 : 4건
No. Article
1 Majority traps observed in H+- or He+-implanted Al-doped 6H-SiC by admittance and deep level transient spectroscopy
Reshanov SA, Klettke O, Pensl G
Materials Science Forum, 433-4, 379, 2002
2 Electrical characterization of erbium-implanted 4H-SiC epilayers
Reshanov SA, Klettke O, Pensl G, Choyke WJ
Materials Science Forum, 433-4, 459, 2002
3 Oxygen-related defect centers observed in 4H/6H-SiC epitaxial layers grown under CO(2) ambient
Klettke O, Pensl G, Kimoto T, Matsunami H
Materials Science Forum, 353-356, 459, 2001
4 Formation of precipitates in 6H-SiC after oxygen implantation and subsequent annealing
Pecz B, Klettke O, Pensl G, Stoemenos J
Materials Science Forum, 338-3, 961, 2000