화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Nanobeam Diffraction: Technique Evaluation and Strain Measurement on Complementary Metal Oxide Semiconductor Devices
Favia P, Gonzales MB, Simoen E, Verheyen P, Klenov D, Bender H
Journal of the Electrochemical Society, 158(4), H438, 2011
2 ZrO2 gate dielectrics produced by ultraviolet ozone oxidation for GaN and AlGaN/GaN transistors
Dora Y, Han S, Klenov D, Hansen PJ, No KS, Mishra UK, Stemmer S, Speck JS
Journal of Vacuum Science & Technology B, 24(2), 575, 2006