검색결과 : 2건
No. | Article |
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1 |
Characterization and operation of a mechanically actuated silicon microgripper Blideran MM, Fleischer M, Henschel W, Kern DP, Sterr J, Schock K, Kleindiek S, Langer MG, Loffler K, Grauvogel F Journal of Vacuum Science & Technology B, 24(6), 3239, 2006 |
2 |
Miniature 3-Axis Micropositioner for Scanning Proximal Probe and Other Applications Kleindiek S, Kim HS, Kratschmer E, Chang TH Journal of Vacuum Science & Technology B, 13(6), 2653, 1995 |