검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Image processing using shape recognition for alignment to damaged registration marks in electron beam lithography Kratschmer E, Klaus DP, Viswanathan R, Turnidge ML, Reed PL, McPhail B Journal of Vacuum Science & Technology B, 27(6), 2563, 2009 |
| 2 |
Polymeric organic-inorganic hybrid nanocomposites: Preparation of polyimide-modified poly(silsesquioxane) using functionalized poly(amic acid alkyl ester) precursors Hedrick JL, Cha HJ, Miller RD, Yoon DY, Brown HR, Srinivasan S, Di Pietro R, Cook RF, Hummel JP, Klaus DP, Liniger EG, Simonyi EE Macromolecules, 30(26), 8512, 1997 |
| 3 |
Electron-Beam Lithography for Advanced Device Prototyping - Process Tool Metrology Rosenfield MG, Thomson MG, Coane PJ, Kwietniak KT, Keller J, Klaus DP, Volant RP, Blair CR, Tremaine KS, Newman TH, Hohn FJ Journal of Vacuum Science & Technology B, 11(6), 2615, 1993 |