화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Hydrogen silsesquioxane-based hybrid electron beam and optical lithography for high density circuit prototyping
Guillorn M, Chang J, Fuller N, Patel J, Darnon M, Pyzyna A, Joseph E, Engelmann S, Ott J, Newbury J, Klaus D, Bucchignano J, Joshi P, Scerbo C, Kratschmer E, Graham W, To B, Parisi J, Zhang Y, Haensch W
Journal of Vacuum Science & Technology B, 27(6), 2588, 2009
2 Low dielectric constant nanocomposite thin films based on silica nanoparticle and organic thermosets
Lin QH, Cohen SA, Gignac L, Herbst B, Klaus D, Simonyi E, Hedrick J, Warlaumont J, Lee HJ, Wu WL
Journal of Polymer Science Part B: Polymer Physics, 45(12), 1482, 2007