검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
In situ characterization of residues formed on a plasma-etching chamber Kawada H, Yamane M, Kitsunai H, Suzuki S Journal of Vacuum Science & Technology A, 19(1), 31, 2001 |
| 2 |
In situ infrared reflection absorption spectroscopy of materials formed on SiO2 in inductively coupled plasma etching chamber Kawada H, Kitsunai H, Tsumaki N Journal of the Electrochemical Society, 146(1), 296, 1999 |