검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Depth Profiling of Dopants in Thin Gate Oxides in Complementary Metal-Oxide-Semiconductor Structures by Resonance Ionization Mass-Spectrometry Downey SW, Emerson AB, Georgiou GE, Bevk J, Kistler RC, Moriya N, Jacobson DC, Wise ML Journal of Vacuum Science & Technology B, 13(2), 167, 1995 |