검색결과 : 1건
No. | Article |
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1 |
High density plasma etching of amorphous CoZrNb films for thin film magnetic devices Shin B, Park IH, Lee JW, Kirn TW, Chung CW Thin Solid Films, 496(2), 631, 2006 |
No. | Article |
---|---|
1 |
High density plasma etching of amorphous CoZrNb films for thin film magnetic devices Shin B, Park IH, Lee JW, Kirn TW, Chung CW Thin Solid Films, 496(2), 631, 2006 |