검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
SiO2 thickness determination by x-ray photoelectron spectroscopy, Auger electron spectroscopy, secondary ion mass spectrometry, Rutherford backscattering, transmission electron microscopy, and ellipsometry Cole DA, Shallenberger JR, Novak SW, Moore RL, Edgell MJ, Smith SP, Hitzman CJ, Kirchhoff JF, Principe E, Nieveen W, Huang FK, Biswas S, Bleiler RJ, Jones K Journal of Vacuum Science & Technology B, 18(1), 440, 2000 |
| 2 |
Characterization of SiOxNy anti-reflective coatings using SIMS and RBS/HFS Saleh AA, Rothman JB, Kirchhoff JF, Yota J, Nguyen C Thin Solid Films, 355-356, 363, 1999 |
| 3 |
Accelerator Based Secondary-Ion Mass-Spectrometry for Impurity Analysis Anthony JM, Kirchhoff JF, Marble DK, Renfrow SN, Kim YD, Matteson S, Mcdaniel FD Journal of Vacuum Science & Technology A, 12(4), 1547, 1994 |