검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Multiple-Pass Writing Optimization for Proximity X-Ray Mask-Making Using Electron-Beam Lithography Puisto DM, Lawliss MS, Rocque JM, Kimmel KR, Hartley JG Journal of Vacuum Science & Technology B, 14(6), 4341, 1996 |
| No. | Article |
|---|---|
| 1 |
Multiple-Pass Writing Optimization for Proximity X-Ray Mask-Making Using Electron-Beam Lithography Puisto DM, Lawliss MS, Rocque JM, Kimmel KR, Hartley JG Journal of Vacuum Science & Technology B, 14(6), 4341, 1996 |