검색결과 : 1건
No. | Article |
---|---|
1 |
Selectivity Variations of Electron-Beam Patterned Silicon Dioxide Films Kimball JF, Allen PE, Griffis DP, Radzimski ZJ, Russell PE Journal of Vacuum Science & Technology A, 12(4), 2457, 1994 |
No. | Article |
---|---|
1 |
Selectivity Variations of Electron-Beam Patterned Silicon Dioxide Films Kimball JF, Allen PE, Griffis DP, Radzimski ZJ, Russell PE Journal of Vacuum Science & Technology A, 12(4), 2457, 1994 |