검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Run to run control in tungsten chemical vapor deposition using H-2/WF6 at low pressures Sreenivasan R, Gougousi T, Xu YH, Kidder J, Zafiriou E, Rubloff GW Journal of Vacuum Science & Technology B, 19(5), 1931, 2001 |
| No. | Article |
|---|---|
| 1 |
Run to run control in tungsten chemical vapor deposition using H-2/WF6 at low pressures Sreenivasan R, Gougousi T, Xu YH, Kidder J, Zafiriou E, Rubloff GW Journal of Vacuum Science & Technology B, 19(5), 1931, 2001 |