검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Plasma-Assisted ALD for the Conformal Deposition of SiO2: Process, Material and Electronic Properties Dingemans G, van Helvoirt CAA, Pierreux D, Keuning W, Kessels WMM Journal of the Electrochemical Society, 159(3), H277, 2012 |
| 2 |
Low Temperature Plasma-Enhanced Atomic Layer Deposition of Metal Oxide Thin Films Potts SE, Keuning W, Langereis E, Dingemans G, van de Sanden MCM, Kessels WMM Journal of the Electrochemical Society, 157(7), P66, 2010 |
| 3 |
Thermal and Plasma Enhanced Atomic Layer Deposition of Al2O3 on GaAs Substrates Sioncke S, Delabie A, Brammertz G, Conard T, Franquet A, Caymax M, Urbanzcyk A, Heyns M, Meuris M, van Hemmen JL, Keuning W, Kessels WMM Journal of the Electrochemical Society, 156(4), H255, 2009 |