검색결과 : 6건
| No. | Article |
|---|---|
| 1 |
Laser doping for microelectronics and microtechnology Sarnet T, Kerrien G, Yaakoubi N, Bosseboeuf A, Dufour-Gergam E, Debarre D, Boulmer J, Kakushima K, Laviron C, Hernandez M, Venturini J, Bourouina T Applied Surface Science, 247(1-4), 537, 2005 |
| 2 |
Gas immersion laser doping (GILD) for ultra-shallow junction formation Kerrien G, Sarnet T, Debarre D, Boulmer J, Hernandez M, Laviron C, Semeria MN Thin Solid Films, 453-54, 106, 2004 |
| 3 |
Excimer laser thermal processing of ultra-shallow junction: laser pulse duration Venturini J, Hernandez M, Kerrien G, Laviron C, Camel D, Santailler JL, Sarnet I, Boulmer J Thin Solid Films, 453-54, 145, 2004 |
| 4 |
Optical characterization of laser processed ultra-shallow junctions Kerrien G, Hernandez M, Laviron C, Sarnet T, Debarre D, Noguchi T, Zahorski D, Venturini J, Semeria MN, Boulmer J Applied Surface Science, 208, 277, 2003 |
| 5 |
Laser thermal processing for ultra shallow junction formation: numerical simulation and comparison with experiments Hernandez M, Venturini J, Zahorski D, Boulmer J, Debarre D, Kerrien G, Sarnet T, Laviron C, Semeria MN, Camel D, Santailler JL Applied Surface Science, 208, 345, 2003 |
| 6 |
Ultra-shallow, super-doped and box-like junctions realized by laser-induced doping Kerrien G, Boulmer J, Debarre D, Bouchier D, Grouillet A, Lenoble D Applied Surface Science, 186(1-4), 45, 2002 |