검색결과 : 5건
No. | Article |
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1 |
Low-temperature RPCVD of Si, SiGe alloy, and Si1-yCy films on Si substrates using trisilane (Silcore (R)) Gouye A, Kermarrec O, Halimaoui A, Campidelli Y, Rouchon D, Burdin M, Holliger P, Bensahel D Journal of Crystal Growth, 311(13), 3522, 2009 |
2 |
Germanium-based nanophotonic devices: Two-dimensional photonic crystals and cavities Boucaud P, El Kurdi M, David S, Checoury X, Li X, Ngo TP, Sauvage S, Bouchier D, Fishman G, Kermarrec O, Campidelli Y, Bensahel D, Akatsu T, Richtarch C, Ghyselen B Thin Solid Films, 517(1), 121, 2008 |
3 |
Si/SiGe growth by low-energy plasma-enhanced chemical vapor deposition Pin G, Kermarrec O, Chabanne G, Campidelli Y, Chevrier JB, Billon T, Bensahel D Journal of Crystal Growth, 286(1), 11, 2006 |
4 |
Resonant tunneling in Si-SiGe superlattices on relaxed buffer substrates Tsujino S, Mentese S, Diehl L, Muller E, Haas B, Bachle D, Stutz S, Grutzmacher D, Campidelli Y, Kermarrec O, Bensahel D Applied Surface Science, 224(1-4), 377, 2004 |
5 |
Strain compensated Si/Si0.2Ge0.8 quantum cascade structures grown by low temperature molecular beam epitaxy Grutzmacher D, Mentese S, Muller E, Diehl L, Sigg H, Campidelli Y, Kermarrec O, Bensahel D, Roch T, Stangl J, Bauer G Journal of Crystal Growth, 251(1-4), 707, 2003 |