화학공학소재연구정보센터
검색결과 : 5건
No. Article
1 Low-temperature RPCVD of Si, SiGe alloy, and Si1-yCy films on Si substrates using trisilane (Silcore (R))
Gouye A, Kermarrec O, Halimaoui A, Campidelli Y, Rouchon D, Burdin M, Holliger P, Bensahel D
Journal of Crystal Growth, 311(13), 3522, 2009
2 Germanium-based nanophotonic devices: Two-dimensional photonic crystals and cavities
Boucaud P, El Kurdi M, David S, Checoury X, Li X, Ngo TP, Sauvage S, Bouchier D, Fishman G, Kermarrec O, Campidelli Y, Bensahel D, Akatsu T, Richtarch C, Ghyselen B
Thin Solid Films, 517(1), 121, 2008
3 Si/SiGe growth by low-energy plasma-enhanced chemical vapor deposition
Pin G, Kermarrec O, Chabanne G, Campidelli Y, Chevrier JB, Billon T, Bensahel D
Journal of Crystal Growth, 286(1), 11, 2006
4 Resonant tunneling in Si-SiGe superlattices on relaxed buffer substrates
Tsujino S, Mentese S, Diehl L, Muller E, Haas B, Bachle D, Stutz S, Grutzmacher D, Campidelli Y, Kermarrec O, Bensahel D
Applied Surface Science, 224(1-4), 377, 2004
5 Strain compensated Si/Si0.2Ge0.8 quantum cascade structures grown by low temperature molecular beam epitaxy
Grutzmacher D, Mentese S, Muller E, Diehl L, Sigg H, Campidelli Y, Kermarrec O, Bensahel D, Roch T, Stangl J, Bauer G
Journal of Crystal Growth, 251(1-4), 707, 2003