화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Etching of silicon native oxide using ultraslow multicharged Arq+ ions
Le Roux V, Machicoane G, Kerdiles S, Laffitte R, Bechu N, Vallier L, Borsoni G, Korwin-Pawlowski ML, Roman P, Wu CT, Ruzyllob J
Journal of the Electrochemical Society, 151(1), G76, 2004
2 Ultrathin SiO2 layers formation by ultraslow single- and multicharged ions
Borsoni G, Le Roux V, Laffitte R, Kerdiles S, Bechu N, Vallier L, Korwin-Pawlowski ML, Vannuffel C, Bertin F, Vergnaud C, Chabli A, Wyon C
Solid-State Electronics, 46(11), 1855, 2002
3 Spectroscopic ellipsometry analysis of nanocrystalline silicon carbide obtained at low temperature
Kerdiles S, Madelon R, Rizk R
Applied Surface Science, 184(1-4), 150, 2001