검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Investigating slurry transport beneath a wafer during chemical mechanical polishing processes Coppeta J, Rogers C, Racz L, Philipossian A, Kaufman FB Journal of the Electrochemical Society, 147(5), 1903, 2000 |
| 2 |
Wettability of Polished Silicon-Oxide Surfaces Thomas RR, Kaufman FB, Kirleis JT, Belsky RA Journal of the Electrochemical Society, 143(2), 643, 1996 |
| 3 |
Copper Interconnection Integration and Reliability Hu CK, Luther B, Kaufman FB, Hummel J, Uzoh C, Pearson DJ Thin Solid Films, 262(1-2), 84, 1995 |