검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Optical properties of ion-implanted silicon and separation by implantation of oxygen silicon-on-insulator substrates in the infrared: Study of B+ and P-2(+) implantation doping Katsidis CC, Siapkas DI Thin Solid Films, 517(15), 4307, 2009 |
| 2 |
Formation of conducting and insulating layered structures in Si by ion implantation - Process control using FTIR spectroscopy Katsidis CC, Siapkas DI, Robinson AK, Hemment PLF Journal of the Electrochemical Society, 148(12), G704, 2001 |
| 3 |
Structural and Compositional Characterization of High-Energy Separation by Implantation of Oxygen Structures Using Infrared-Spectroscopy Siapkas DI, Hatzopoulos N, Katsidis CC, Zorba T, Mitsas CL, Hemment PL Journal of the Electrochemical Society, 143(9), 3019, 1996 |