검색결과 : 3건
No. | Article |
---|---|
1 |
Plasma etch fabrication of 60:1 aspect ratio silicon nanogratings with 200 nm pitch Mukherjee P, Bruccoleri A, Heilmann RK, Schattenburg ML, Kaplan AF, Guo LJ Journal of Vacuum Science & Technology B, 28(6), C6P70, 2010 |
2 |
Multilayer pattern transfer for plasmonic color filter applications Kaplan AF, Xu T, Wu YK, Guo LJ Journal of Vacuum Science & Technology B, 28(6), C6O60, 2010 |
3 |
Subwavelength grating structures with magnetic resonances at visible frequencies fabricated by nanoimprint lithography for large area applications Kaplan AF, Chen YH, Kang MG, Guo LJ, Xu T, Luo XG Journal of Vacuum Science & Technology B, 27(6), 3175, 2009 |