화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Plasma etch fabrication of 60:1 aspect ratio silicon nanogratings with 200 nm pitch
Mukherjee P, Bruccoleri A, Heilmann RK, Schattenburg ML, Kaplan AF, Guo LJ
Journal of Vacuum Science & Technology B, 28(6), C6P70, 2010
2 Multilayer pattern transfer for plasmonic color filter applications
Kaplan AF, Xu T, Wu YK, Guo LJ
Journal of Vacuum Science & Technology B, 28(6), C6O60, 2010
3 Subwavelength grating structures with magnetic resonances at visible frequencies fabricated by nanoimprint lithography for large area applications
Kaplan AF, Chen YH, Kang MG, Guo LJ, Xu T, Luo XG
Journal of Vacuum Science & Technology B, 27(6), 3175, 2009