검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Use of Interference Lithography to Pattern Arrays of Submicron Resist Structures for Field-Emission Flat-Panel Displays Fernandez A, Nguyen HT, Britten JA, Boyd RD, Perry MD, Kania DR, Hawryluk AM Journal of Vacuum Science & Technology B, 15(3), 729, 1997 |
| 2 |
Fabrication of Sub-0.5 Mu-M Diameter Cobalt Dots on Silicon Substrates and Photoresist Pedestals on 50 cm X 50 cm Glass Substrates Using Laser Interference Lithography Spallas JP, Boyd RD, Britten JA, Fernandez A, Hawryluk AM, Perry MD, Kania DR Journal of Vacuum Science & Technology B, 14(3), 2005, 1996 |
| 3 |
Precision Optical Aspheres for Extreme-Ultraviolet Lithography Kania DR, Gaines DP, Sweeney DS, Sommargren GE, Lafontaine B, Vernon SP, Tichenor DA, Bjorkholm JE, Zernike F, Kestner RN Journal of Vacuum Science & Technology B, 14(6), 3706, 1996 |
| 4 |
Field Emitter Array Mask Patterning Using Laser Interference Lithography Spallas JP, Hawryluk AM, Kania DR Journal of Vacuum Science & Technology B, 13(5), 1973, 1995 |