검색결과 : 1건
No. | Article |
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1 |
Effect of copolymer composition on acid-catalyzed deprotection reaction kinetics in model photoresists Kang SHH, Prabhu VM, Vogt BD, Lin EK, Wu WL, Turnquest K Polymer, 47(18), 6293, 2006 |
No. | Article |
---|---|
1 |
Effect of copolymer composition on acid-catalyzed deprotection reaction kinetics in model photoresists Kang SHH, Prabhu VM, Vogt BD, Lin EK, Wu WL, Turnquest K Polymer, 47(18), 6293, 2006 |