검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Structural characteristics of AIN films deposited by pulsed laser deposition and reactive magnetron sputtering : A comparative study Jagannadham K, Sharma AK, Wei Q, Kalyanraman R, Narayan J Journal of Vacuum Science & Technology A, 16(5), 2804, 1998 |