검색결과 : 2건
No. | Article |
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1 |
Nitrogen incorporation in thin silicon oxides in a N2O plasma -Effects of processing conditions Kaluri SR, Hess DW Journal of the Electrochemical Society, 145(2), 662, 1998 |
2 |
Constant-Current N2O Plasma Anodization of Silicon Kaluri SR, Hess DW Journal of the Electrochemical Society, 144(6), 2200, 1997 |