검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Assessing the mask clamping ability of a low thermal expansion material chuck Zeuske JR, Vukkadala P, Engelstad RL, Mikkelson AR, Kalkowski G, Risse S, Mueller S Journal of Vacuum Science & Technology B, 28(6), C6E17, 2010 |