검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Scaling down lateral dimensions of silicon nanopillars fabricated by reactive ion etching with Au/Cr self-assembled clusters as an etch mask Kaliasas R, Baltrusaitis J, Mikolajunas M, Jakucionis L, Vironis D Thin Solid Films, 520(6), 2041, 2012 |
| 2 |
A study of stacked PECVD silicon nitride films used for surface micromachined membranes Mikolajunas M, Kaliasas R, Andrulevicius M, Grigaliunas V, Baltrusaitis J, Virzonis D Thin Solid Films, 516(23), 8788, 2008 |