검색결과 : 1건
No. | Article |
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1 |
A Simple Chemical Treatment for Preventing Thermal Bubbles in Silicon-Wafer Bonding Tong QY, Kaido G, Tong L, Reiche M, Shi F, Steinkirchner J, Tan TY, Gosele U Journal of the Electrochemical Society, 142(10), L201, 1995 |