검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
In-Situ Monitoring of GaAs Etched with a Cl-2/Ar Discharge in an Electron-Cyclotron-Resonance Source Kahaian DJ, Thomas S, Pang SW Journal of Vacuum Science & Technology B, 13(2), 253, 1995 |
| No. | Article |
|---|---|
| 1 |
In-Situ Monitoring of GaAs Etched with a Cl-2/Ar Discharge in an Electron-Cyclotron-Resonance Source Kahaian DJ, Thomas S, Pang SW Journal of Vacuum Science & Technology B, 13(2), 253, 1995 |