화학공학소재연구정보센터
검색결과 : 5건
No. Article
1 Mechanism of the film composition formation during magnetron sputtering of WTi
Shaginyan LR, Misina M, Kadlec S, Jastrabik L, Mackova A, Perina V
Journal of Vacuum Science & Technology A, 19(5), 2554, 2001
2 Plasma diagnostics in a triode ion plating system
Wouters S, Kadlec S, Quaeyhaegens C, Stals LM
Journal of Vacuum Science & Technology A, 16(5), 2816, 1998
3 Discharge Characteristics of a Facing Target Sputtering Device Using Unbalanced Magnetrons
Muralidhar GK, Musil J, Kadlec S
Journal of Vacuum Science & Technology A, 14(4), 2182, 1996
4 Optimized Magnetic-Field Shape for Low-Pressure Magnetron Sputtering
Kadlec S, Musil J
Journal of Vacuum Science & Technology A, 13(2), 389, 1995
5 Complex XRD Microstructural Studies of Hard Coatings Applied to PVD-Deposited Tin Films .2. Transition from Porous to Compact Films and Microstructural Inhomogeneity of the Layers
Kuzel R, Cerny R, Valvoda V, Blomberg M, Merisalo M, Kadlec S
Thin Solid Films, 268(1-2), 72, 1995