검색결과 : 5건
No. | Article |
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1 |
Mechanism of the film composition formation during magnetron sputtering of WTi Shaginyan LR, Misina M, Kadlec S, Jastrabik L, Mackova A, Perina V Journal of Vacuum Science & Technology A, 19(5), 2554, 2001 |
2 |
Plasma diagnostics in a triode ion plating system Wouters S, Kadlec S, Quaeyhaegens C, Stals LM Journal of Vacuum Science & Technology A, 16(5), 2816, 1998 |
3 |
Discharge Characteristics of a Facing Target Sputtering Device Using Unbalanced Magnetrons Muralidhar GK, Musil J, Kadlec S Journal of Vacuum Science & Technology A, 14(4), 2182, 1996 |
4 |
Optimized Magnetic-Field Shape for Low-Pressure Magnetron Sputtering Kadlec S, Musil J Journal of Vacuum Science & Technology A, 13(2), 389, 1995 |
5 |
Complex XRD Microstructural Studies of Hard Coatings Applied to PVD-Deposited Tin Films .2. Transition from Porous to Compact Films and Microstructural Inhomogeneity of the Layers Kuzel R, Cerny R, Valvoda V, Blomberg M, Merisalo M, Kadlec S Thin Solid Films, 268(1-2), 72, 1995 |